NanoShield™ Series Catridges & Capsules

High Flow Rates, Low Pressure Drop, and Longer Filter Lifetime
NanoSHIELD™ hollow fiber series polypropylene filter cartridges have been engineered to combine the highest level of particle retention with superior flow rates and minimal pressure drop for demanding applications at the 45 nm node.

Peak Performance Provided by Hollow Fiber Technology (HFT)
NanoSHIELD hollow fiber series filter cartridges with HFT provide up to 2 times more surface area and up to 5 times higher flow rates at the same pressure drop when compared to pleated membrane cartridges. This increase to flow and decrease to pressure drop allows a typical 10" NanoSHIELD hollow fiber series filter cartridge to perform similarly to a 20" pleated filter cartridge. This significant advantage allows for the use of smaller and less costly filter housings which reduce hold-up volume, filter change-out times, and total cost-of-ownership for the life of the process. In addition, 3M Purification Inc.'s HFT produces a membrane that is up to 2 times thicker than other technologies which in turn maximizes the depth of filtration and particle removal efficiency.

NanoSHIELD™ Hollow Fiber Series Cartridge Construction
The hollow fiber polypropylene membrane in an all polyethylene construction provides low metallic/ionic contamination and excellent resistance to most chemicals. Metallic or ionic contaminants can extract from surface modified and or improperly manufactured filters, which may reduce shelf life and or change the photo-speed, viscosity, or molecular weight of advanced chemicals. For this reason, all NanoSHIELD hollow fiber series filters are critically cleaned and integrity tested to provide low extractables and process repeatability out of the box. The compact design of NanoSHIELD hollow fiber series polypropylene filter cartridges make them ideally suited for critical applications requiring low hold-up volume with superior flow rates and high particle retention at 0.01, 0.02, 0.05, and 0.1 µm.

Features & Benefits

Hollow Fiber Technology.

• Up to 2 times more surface area as compared to equivalent sized pleated filters.
• Increased depth (2x thicker) of filtration results in improved particle retention.

Large Surface Area

• Up to 5 times higher flow rates as compared to other pleated cartridges.
• 10" NanoSHIELD hollow fiber series cartridges flow similar to 20" pleated cartridges
• Increased lifetime, throughput, and overall equipment effectiveness (OEE).

Compact Design.

• Allows for smaller, less costly filter housings.
• Reduces hold-up volume, exposure, and waste of expensive chemicals.

0.01 µm and 0.02 µm Retention Ratings.

• Superior removal of particles, gels, and micro-bubbles.
• Reduced micro-bridge and wafer level defects for 193 nm photoresists.

Quality Manufacturing.

• Manufactured in a cleanroom to reduce particle adders and extractables.
• Filters are critically cleaned and tested for process repeatability