NanoSHIELD Hollow Fiber Series MDC Filter Capsules Datasheet

NanoSHIELD™ hollow fiber series MDC filter capsules have been specially designed to reduce wafer level defects from advanced photoresist and ancillary chemical applications. Utilizing Hollow Fiber Technology (HFT), NanoSHIELD hollow fiber series filters are able to deliver superior flow with minimal pressure drop, while maintaining the highest level of filter efficiency in a compact design.

The small compact design of NanoSHIELD hollow fiber series MDC filter capsules make them ideally suited for applications requiring low hold-up volume with superior flow rates and high particle retention at 0.01, 0.02, 0.05, and 0.1 µm.

Manufactured in a clean room environment from polypropylene and polyethylene materials, NanoSHIELD capsules will not contribute to ionic, organic, and metallic contaminant levels in the process fluid. Ionic, organic, and metallic contaminants can extract from surface modified and or improperly manufactured filters, which may reduce shelf life, or change the photo-speed and molecular weight of the photo-chemical. NanoSHIELD MDC capsules are critically cleaned, integrity tested, and rinsed with 18 megohm DI water to minimize extractables and allow process repeatability out of the box.