yieldOPTIMIZER

In today's semiconductor production flow, yield issues can often be best defined when you have easy access to comparative results at all levels. yieldOPTIMIZER provides a powerful means of unlayering and correlating parametric and binning results over time or at the product, program, lot and wafer level.

Because it is integrated into the IDS dataBASE system, the yieldOPTIMIZER interface enables you to easily select your view of parametric trends by program. From that view, you can instantly zoom in to view specific lots or wafers. Database queries are automatically built to bring all of the information you need into one comprehensive, configurable chart. Trends in parametric or bin results can be easily charted and correlated, providing comparative analysis in seconds.

Line or boxplot trends on parametric statistics (average, median, percentiles, outliers, min./max., etc.) can be simultaneously displayed for all retrieved parameters, or for any combination of those parameters. A correlation matrix for all the retrieved parameters is automatically generated within the trend chart.

Binning trend analysis gives you an overall (percent) bin yield view at any level. Like parametric trending, you can view results at the program level, then zoom into any lot or wafer within the retrieved programs. Yield variables such as cluster factor, yield predictors and defect density can also be plotted within the chart.

yieldOPTIMIZER features include: 

• PARAMETRIC STATISTICAL TRENDING (LINE OR BOXPLOT) 
• INTEGRATED PARAMETRIC CORRELATION MATRIX 
• BIN "STACK" YIELD TRENDING 
• BIN YIELD PLOTS ON m (CLUSTER FACTOR); y1, y2, y... (YIELD PREDICTORS); AND d0 (DEFECT DENSITY)

yieldOPTIMIZER Retrieval Window
Load specified results from dataBASE for multiple binning, yield and parametric trends.

Parametric Trends
Display lot-level trend and cross correlation plots of parameters from multiple process levels –e.g. wafer sort vx. PCM

Bin Stack Trend
Display bin distribution at lot and wafer levels for the selected program.

IDS Software Systems, 3 Waters Park Drive, Suite 222, P.O. Box 6936, San Mateo, CA 94403. Tel: 650-349-0500; Fax: 650-349-0101.