Yield Analysis and Planning Tool

Version 1.1 pdEx is a yield analysis and planning tool that helps engineers prioritize and focus yield improvement efforts and quantitatively plan for new products and product modifications. This tool combines critical area extraction with analysis of defect metrology data from electrical test and wafer inspection to calculate defect-limited yield.

The tool helps focus overall yield improvement efforts by quantifying defect-limited yield to reveal the impact of yield loss due to defects versus other causes such as systematic failures. Specific problem areas are identified by determining which products, processes, layers, or design blocks are most affected by defects. Problems can be further pinpointed by calculating yield loss due to specific defect types and sizes.

This tool also provides the quantitative decision support needed for product planning. Engineers can identify how a given product will yield across different fabs, and optimize production capacity. They can also calculate expected yield improvements from design shrinks and other layout modifications. Furthermore, it helps determine how various memory redundancy schemes affect final yield.

PDF Solutions, Inc., 333 W San Carlos St., San Jose, CA 95110. Tel: (408) 280-7900. Fax: (408) 280-7915