WIS - 800 D
Source: Brumley South, Inc. (BSI, Inc.)
Estek WIS - 800 D System is designed to completely analyze substrates, films and oxides used in the manufacture of semiconductors
Estek WIS - 800 D System is designed to completely analyze substrates, films and oxides used in the manufacture of semiconductors.
To achieve this inspection capability, the instrument has two separate collection subsystems: the Dark Channel (DC), which detects that scatter light when scanned by a laser beam, and the Light Channel (LC), which detects defects that deflect light when scanned by a laser beam. Sorting criteria are defined by the user. This flexibility allows the engineer to taylor programs for specific applications, depending on what information is desired for defect identification and proceess control.
To achieve this inspection capability, the instrument has two separate collection subsystems: the Dark Channel (DC), which detects that scatter light when scanned by a laser beam, and the Light Channel (LC), which detects defects that deflect light when scanned by a laser beam. Sorting criteria are defined by the user. This flexibility allows the engineer to taylor programs for specific applications, depending on what information is desired for defect identification and proceess control.
Brumley South, Inc. (BSI, Inc.), 422 North Broad Street, Mooresville, NC 28115. Tel: 704-664-9251; Fax: 704-664-9246.