WATLOW'S NEW HEATERS ARE IDEAL FOR SEMICONDUCTOR WET CHEMISTRY APPLICATIONS

ST. LOUIS – Watlow Electric Manufacturing Co. recently unveiled its new, ultra pure, thick film quartz heater modules utilizing a recently patented (#6,037,574) technology. These high-watt density heater modules provide a superior heating method for semiconductor wet chemistry applications. Intended for deionized (DI) water and aggressive chemicals, these thick film quartz heater modules provide ultra pure semiconductor-grade quartz performance. The use of thick film technology has allowed Watlow to supplant the inefficient heat output of an infrared quartz heater while avoiding the permeability problems experienced with Teflon coated products by utilizing semiconductor-grade quartz.

Watlow's thick film heating elements are applied directly onto the exterior surface of the quartz tubes, providing more efficient transfer of heat energy with rapid response to changes in flow and temperature.

These state-of-the-art heaters are ideal for use in aggressive chemical applications such as ammonium hydrochloride, hydrochloric acid, hydrogen peroxide, phosphoric acid and ultra pure 18 megohm deionized water and others. The heater modules are 50 percent smaller than other competitive heating technologies. The heaters' design eliminates process contamination risk in the event of element failure.

The new lines' benefits include: rapid thermal response, compact size, high-watt density, ultra pure quartz, long life, maximum process temperature of 180°C (356°F), maximum operating pressure of 75 psi and maximum flow rate of 35 liters per minute.

The heaters can be supplied as single module units that customers can integrate directly into a tool. Watlow can perform any level of integration from combining multiple modules within a single enclosure to providing a complete turnkey heater and control system.

Watlow is the world's largest custom designer and manufacturer of industrial heaters, sensors and controls. The firm's corporate headquarters are in St. Louis, Missouri with manufacturing facilities worldwide.

Watlow Electric Manufacturing Company, 12001 Lackland Road, St. Louis, MO 63146. Tel: 314-878-4600; Fax: 314-878-2360.