WaferMap Software
Keithley Instruments, Inc. offers the Keithley Test Environment (KTE) WaferMap software for use in parametric testing. KTE WaferMap is used for process monitoring and device characterization on semiconductor wafers and operates on Sun Solaris (UNIX) in the KTE 3.2 software environment, with Windows NT 10 support to be added later. WaferMap provides real-time process characterization for rapid diagnosis of variations. KTE WaferMap provides users quick feedback and powerful visualization tools at the tester or from a networked workstation.
The KTE WaferMap is an interactive data visualization tool for use on either live or stored data. WaferMap offers comprehensive wafer mapping, statistical analysis, and pass/fail determination of real-time or stored test results. Separate wafer-centric graphical user interfaces (GUIs) are tailored for production operators and development engineers. The live pass/fail screen gives the parametric test operator a comprehensive overview of the testing process. As each site test is completed, the on-screen graphic of the wafer map is updated in either red (indicating a site failure) or green (for a site pass). As each wafer test is completed, the wafer cassette graphic is similarly updated to indicate whether the wafer has passed or failed.
WaferMap's search function can be used to identify out-of-limit parameters for wafers failing tests or to search for the desired parameter name or category. When a parameter is elected, the WaferMap automatically updates the graphic to illustrate how the parameter varies across the different test sites. At this point, any data analysis tool can be selected from the toolbar to provide a graph of the parameter as new results are acquired. In addition, stored results from previous lots can be analyzed. Any combination of wafer lots, wafers, and test sites can be selected for analysis.
Since each fab has its own pass/fail criteria, WaferMap includes a pass/fail configuration screen for specifying these rules at the site or die level, wafer level, and lot level. A parameter analysis configuration screen is used to specify how information is displayed. Most parametric test software has a limited set of analysis tools. However, KTE WaferMap is equipped with a comprehensive set of both graphing and statistical analysis functions that provides real-time graphing of pass/fail or single parameter analysis. These tools simplify turning test data into essential process information by creating a variety of plots and graphs. Graphing functions include XY scatter plot, line graph, line graph with limits, bar graph, histogram, interval plot, box plot, XYZ scatter plot, contour plot, 2D wafer map contour (surface) plot, surface plot, rotatable 3D wafer map surface plot, and limit box plot. Statistical analysis functions include summary statistics, regression, control chart, distribution fitting, and process capability.
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