Wafer Tracking Software

Auto-Softs a wafer-level tracking software system that works with optical character recognition (OCR) readers to ensure correct processing of wafers throughout fabrication. The program is designed to detect wafers that have been incorrectly placed in the wrong lot carrier and enable the safe re-use of test wafers by automatically verifying the correct contamination level of each test wafer in a lot before processing occurs. Key features include: wafer identification and tracking without inscribing second wafer ID; verification of all wafers in a lot or partial verification; contamination level verification of test wafers; process step tracking, automated tracking of lot splits/merges and wafer slot positions at the various process steps; database of the OCR tool, including lot, wafer, slot and contamination data at individual process steps; business rules-based cell controller for wafer sorters and OCR readers; and integration of wafer sorters and OCR readers with MES.

<%=company%>, 5245 Yeager Road, Salt Lake City, UT 84116. Tel: 801-322-2069. Fax: 801-322-1846.