Wafer Temperature Monitor
Source: CI Semi
The NTM500 is a noncontact , emissivity independent, wafer temperature monitoring system, to be used in-situ during process
The NTM500 is a noncontact , emissivity independent, wafer temperature monitoring system, to be used in-situ during process. It is applicable to RTP, PVD, CVD and other processes. The monitor incorporates real time, same point, active emissivity measurement and compensation. This feature, as an addition to standard pyrometry, allows accurate extraction of the temperature for all product wafers, regardless of thin film structure. The system is available in three different temperature ranges: 200-600°C, 250-700°C and 400-1250°C to fit various applications.
CI Systems Inc., 30961 W. Agoura Rd., S. 109, Westlake Village, CA, 91361. Tel: 650-566-0444. Fax: 650-566-9784.