Wafer Stocker
By moving WIP storage between floors, the TurboStocker XT can reduce cleanroom WIP storage footprint as much as 75% by minimizing the number of stockers required on the production floor. This gives manufacturers greater flexibility in creating the manufacturing environment they need to achieve their business goals and remain competitive. Connecting multiple production floors together with the TurboStocker XT creates a single, integrated manufacturing environment with greater flexibility in routing work-in-process wafers. Manufacturers can use the freed-up floorspace to reduce the size of the cleanroom or add more process tools to increase manufacturing capacity.
The TurboStocker XT incorporates many of the same system features found on current 200mm and 300mm TurboStocker products including the I/O, user interface, and the robot arm. The new system also integrates with the company's interbay AeroTrak and intrabay AeroLoader wafer transport systems and TransNet material control software. The TurboStocker XT has scalable standard height configurations up to thirty meters (approximately 98 feet) for a maximum storage capacity of 540 wafer carriers. Storage modules can be integrated at any point along the vertical axis including positions in the sub-fab or air plenum. These flexible configurations allow manufacturers to create the optimum storage configuration to fit their facility requirements.
The company offers a broad range of factory automation systems including interbay storage and transport systems, intrabay transport systems, reticle management systems, tool automation systems, manufacturing execution system (MES) software, material control software (MCS), equipment integration software, and advanced planning and scheduling software.
PRI Automation, Inc., 805 Middlesex Tpke., Billerica, MA 01821. Tel: 978-670-4270. Fax: 978-663-9471.