Wafer Stepper
Source: Ultratech Stepper, Inc.
The Saturn Spectrum 3 is a lithography tool designed specifically for bump (flip-chip) process applications
The Saturn Spectrum 3 is a lithography tool designed specifically for bump (flip-chip) process applications. This wafer stepper also offers flexibility for thick-film lithography applications. This system utilizes the broadband ghi-line optics technology, and the company believes it is capable of processing any g- or i-line photosensitive film from 1.0 micron to more than 100 microns thick on the stepper. With 2.0-micron resolution and usable depth-of-focus of greater than 5.0 microns, the system provides a high degree of process latitude. It is equipped with a fully automatic wafer-size change feature that allows back-to-back processing of wafers ranging from 4 to 8 inches in diameter.
Ultratech Stepper, Inc., 3050 Zanker Road, San Jose, CA 95134. Tel: 408-321-8835. Fax: 408-325-6444.
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