Wafer Marking System

Packard BioChip Technologiesrk SigmaXC is a clean room wafer marking system. This system has a mini-environment and an automated 300mm front opening unified pod. Also featured is an air handling system with 0.12µm filter that provides laminar flow over the wafer handling area. An ionizer prevents any effects of static charge. This system is capable of loading 26 wafers for marking.

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