Wafer Inspection Station
Source: ADE Corporation
The Constellation wafer inspection station is an automatic inspection tool designed to handle the needs of both 200mm and 300mm polished and epi wafer inspection
ADE CorporationConstellation wafer inspection station is an automatic inspection tool designed to handle the needs of both 200 mm and 300 mm polished and epi wafer inspection. Through its modular design, this station offers advanced wafer inspection capabilities for high volume 200 mm production, while offering software-driven conversions to handle 300 mm pilot and pre-production development. This station employs optical scanning technology (AWIS) and data analysis software to analyze, characterize and sort multiple classes of surface defects, including: particles, scratches, pits, slip, mounds, dimples, haze and COPs. Using a proprietary spiral raster scan technology, it achieves high throughput levels. Wafers are handled and inspected in the horizontal orientation, using a high-speed multiple axis robot to transfer wafers from their cassettes to the inspection gage and back. The modular design provides several user-selectable configuration options that allow multiple cassette sorting capability in a miniature environment.
<%=company%>, 80 Wilson Way, Westwood, MA 02090-1806. Tel: 781-467-3500. Fax: 781-461-1575.