Wafer Handling Robots

The AdeptVicron robot series is designed for semiconductor wafer handling applications, and consists of four models that will accommodate different requirements. The 200S (single arm) and 200D (dual arm) are designed to handle up to 200mm wafers. The 300S (single arm) and 300D (dual
arm) models handle up to 300mm wafers. The robots are designed for semiconductor automation customers who need advanced robot and motion technology.

The models are atmospheric three-axis (single arm) and four-axis(dual arm) robots and feature absolute encoders. The units are clean room Class 1 robots designed for handling 200mm and 300mm wafers. The robots also feature vacuum-chucking at the wafer center and minimal particle generation.

Adept Technology, Inc., 150 Rose Orchard Way, San Jose, CA 95134. Tel: (408) 432-0888. Fax: (408) 432-8707.