Wafer Charging Monitors, Inc.

Wafer Charging Monitors is the leading supplier of products and services for quantifying wafer charging in semiconductor process equipment including: ion implanters, ashers, etchers, and plasma deposition systems. WCM offers CHARM-2 monitor wafers, ChargeMap software, a complete Applications Package, and Equipment/Process Evaluation services to semiconductor equipment makers and IC manufacturers worldwide.

Re-usable CHARM-2 monitor wafers offer fab engineers the ability to measure the charging characteristics of plasmas or ion beams before product wafers are exposed to them. This can avoid or help eliminate costly yield problems. Moreover, unlike other monitors, CHARM-2 wafers measure not only electrostatic potential, but also charging current: the real cause of charging damage. WCM's Equipment-and-Process Evaluation Services provide the customer with CHARM-2 wafer pre-conditioning, testing, data analysis, summary reports and help in predicting device damage. For customers who prefer to do on-site analysis of CHARM-2 data, we offer ChargeMap software with installation support and in-house training.