Application Note: VOC Abatement For Semiconductor Fabrication

Semiconductor companies like ST Micro use organic solvents in the wafer manufacturing process. ST Micro wished to increase manufacturing capacity at their fab in Phoenix which would increase their solvent air exhaust flow, invoking requirements to control volatile organic compound (VOC) emissions. Preferred for its low capital cost, high reliability and low operating costs, the customer chose to install a Munters zeolite rotor concentrator abatement system. The rotor concentrator system concentrates the initial flow of 45,000 cfm (28,600 Nm3/hr) down to only 3,000 scfm (1,900 Nm3/hr) and destroys the VOC solvents in a small integrated thermal oxidizer. ST Micro's recent compliance test confirmed a system VOC destruction efficiency of greater than 95%.

For the semiconductor industry with 24/7 manufacturing schedules, the main benefits of using a rotor concentrator system are high reliability, steady flow exhaust with minimal pressure fluctuations and considerable operating cost savings. Munters' system concentrates a large exhaust volume containing a low concentration of VOCs into a small concentrated stream that can be efficiently and cost-effectively destroyed in an oxidizer. Pressure drop through the system is low which helps reduce exhaust fan electricity use.