VES-2550 System
Source: Temescal, BOC Coating Technology
Designed to provide high throughput without a load lock, the VES-2550 is suitable for all evaporation applications
Designed to provide high throughput without a load lock, the VES-2550 is suitable for all evaporation applications.
- 25.5-inch (648mm) diameter, low-profile chamber
- Designed for semiconductor production environments
- Accommodates up to three electron beam sources
- Cryopump standard; diffusion pump and turbopump also available
Temescal, BOC Coating Technology, 2700 Maxwell Way, P.O. Box 2529, Fairfield, CA 94533-0252. Tel: 707-423-2100; Fax: 707-425-1706.