Veeco Metrology Receives Order from AMD

Veeco Metrology (Santa Barbara, CA) has received an order from Advanced Micro Devices (AMD) for multiple metrology systems valued at over $2 million. The order includes Critical Dimension Atomic Force Microscopy (CD-AFM) and stylus profilometry systems.

Delivery is scheduled for the second quarter of 1998, for installation at AMD's Fab 30 in Dresden, Germany. The systems to be installed include the new Dektak SXM-320 automated CD-AFM and the Dektak Series V automated stylus profilers, which incorporate cleanroom engineering with robotic handling and integrated SMIF interface.

"This order from AMD demonstrates the growing acceptance in the market of the SXM-320 and the Dektak Series V as next generation, production capable metrology tools." said Dr. Timothy Stultz, Veeco's vice president and general manager.

The Dektak SXM-320 is designed for in-line topographical and critical dimension metrology for advanced semiconductor wafer fabs. The tool is used to characterize photolithographic and etch processes by performing non-destructive measurements of linewidths down to 0.18 micron and below, as well as via and trench depth, side wall slope angle, and 3-D micro-topography of surface textures and defects.

The Dektak V 200-SL is an advanced metrology system that enables monitoring of semiconductor processes in an automated environment. High precision, stylus-based measurement technology delivers step height repeatability for monitoring etch and deposition process uniformity, as well as long scan capabilities for measuring CMP planarity or thin film stress on wafers. The linear encoded sample stage with 0.25 micron resolution and a versatile pattern recognition system ensures sample positioning repeatability for multi-site measurement recipes.

Veeco Metrology is a division of Veeco Instruments Inc. (Plainview, NY).

Edited by Beth Brindle