Varian Semiconductor Ships Its 250th VIISta™ Single-Wafer Medium-Current System

Gloucester, MA – Varian Semiconductor Equipment Associates, Inc., announced recently that it has shipped its 250th VIISta™ single-wafer medium-current system. The machine was shipped to a customer in Japan. Earlier this month, the Company announced the shipment of its 250th VIISta single-wafer high-current system, representing the 500th VIISta platform system shipped to customers. Varian Semiconductor, is believed to lead the market in the high- and medium-current segments, as well as in the single-wafer high-energy market segment.

The VIISta medium-current implanter offers the industry's highest throughput, fastest beam set-up time and highest beam currents among all medium current ion implant suppliers, claim Varian sources. The medium-current product is based on Varian Semiconductor's common platform architecture. It features the Company's patented dual magnet architecture, believed to be providing the industry's best particle and contamination performance, as well as superior angle control due to its patented Varian Positioning System™.

In July, Varian Semiconductor introduced the flagship member of its medium-current family, the VIISta 900XP. The VIISta 900XP, say Varian, is the first ion implanter to achieve 500 wafers per hour – believed to be the highest throughput in the industry. This product is optimized to address typical medium current applications. The new energy extension provides the capability to run applications traditionally assigned to high-energy implanters. The VIISta 900XP delivers new levels in productivity and technology, and, according to Varian, is the only implanter on the market to offer 500 wafers per hour, closed-loop positioning for accurate implant control, and the broadest energy range, 2–900keV. The VIISta 900XP is also compatible with VSEA's previously announced vMask™ product, which reduces customer R&D costs and improves time-to-market for new device designs.

SOURCE: Varian Semiconductor Equipment Associates, Inc.