Product/Service

Variable Angle Spectroscopic Ellipsometer - VUV-VASE

Source: J.A. Woollam Co.
Expand your thin film characterization with a variable angle spectroscopic ellipsometer that measures down to the vacuum ultraviolet
Expand your thin film characterization with a variable angle spectroscopic ellipsometer that measures down to the vacuum ultraviolet.

The VUV-VASE features:

Wide Spectral Range

Material properties can now be studied in the vacuum ultraviolet. Accurately determine optical constants (n and k) from 145nm to 1700nm.Short wavelengths add increased sensitivity to ultrathin films. Perfect for all types of materials: metals, dielectrics, semiconductors, organics,...

Measure at all Lithography Lines:
157nm, 193nm, 248nm, ...

Automated Angle

Computer-controlled angle of incidence, from 25° to 90°, allows you to optimize the measurement sensitivity. Multiple angles of incidence help determine more information-great for multilayers.

Monochromator First

Designed to reduce light that probes your sample - helps protect photosensitive materials.

AutoRetarder

Patented optical design provides the highest accuracy on any sample. Perfect for measurement on any substrate material. Optimize sensitivity for your applications.

Nitrogen Purge

Convenient for VUV measurements - no vacuum.

J.A. Woollam Co., 645 M St., Suite 102, Lincoln, NE 68508. Tel: 402-477-7501; Fax: 402-477-8214.