Vapor Delivery System

The GS-437 vapor delivery system is designed for use in chemical vapor deposition (CVD) and diffusion processes, as well as in etch operations. This system supplies a precise flow of chemical vapor to processes without the use of a carrier gas by controlling vapor pressure using a mass flow controller (MFC).

Its refill system is in the same cabinet as the vaporizer, which allows safe delivery of chemicals and uses considerably less floor space than other vapor delivery systems. The cabinet and vaporizer are heated to prevent recondensation between the vaporizer tank and the process chamber. This system can be used to safely vaporize a range of liquids and flows, including tetraethyloxiarsine(TEOA) and tetraethyloxisilane (TEOS).

The vapor delivery system works by sending liquid from the refill tank into a vaporization tank by nitrogen pressure. The vaporization tank is then heated to change the liquid chemical into a vapor state that is controlled by a high-temperature MFC as it flows to the process reactor. The refill tank continuously refills the vaporizer as the liquid chemicals are vaporized. The accuracy of this system has been demonstrated at +1 percent of full-scale flow with a repeatability of +0.2 percent of full-scale flow.

Aera Corporation, 8601 Cross Park Drive, Austin, TX 78754. Tel: (512) 339-7100. Fax: (512) 339-8889.