Datasheet | March 10, 2016

Vanox® System for Point-of-Use Ultrapure Water Treatment Datasheet

Source: Evoqua Water Technologies

Evoqua introduces a method superior to traditional Ozone or Peroxide based processes for removing total organic carbon (TOC) in a point-of-use (POU) system. This microelectronic/semiconductor treatment system provides Ultrapure water that meets or exceeds the International Technology Roadmap for Semiconductors (ITRS).