Vanox® System for Point-of-Use Ultrapure Water Treatment Datasheet
Source: Evoqua Water Technologies (now part of Xylem)
Evoqua introduces a method superior to traditional Ozone or Peroxide based processes for removing total organic carbon (TOC) in a point-of-use (POU) system. This microelectronic/semiconductor treatment system provides Ultrapure water that meets or exceeds the International Technology Roadmap for Semiconductors (ITRS).
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