Product/Service

Vacuum Cluster Platform

Source: PRI Automation Inc.
PRI offers the VCP Series of fully integrated 200mm and 300mm vacuum cluster tools
PRI Automation Inc.the VCP Series of fully integrated 200mm and 300mm vacuum cluster tools. Available in standard 6 (200mm) and 4 or 7 sided (300mm) configurations, the VCT cluster platforms feature a compact footprint while maintaining PRI's reputation for high reliability and durability. The VCP features numerous sensors strategically placed throughout the system to optimize throughput and ensure safe operation. In addition to load sensors for cassette mapping, cassette presence and wafer protrusion, the vacuum transport chamber utilizes sensors to track the wafer's location throughout the tool. PRI's Vacuum Cluster platform can also be ordered with or without an integrated vacuum pumping system custom designed for your application. Features:
  • Small Footprint
  • SEMI/MESC Compatible
  • High Reliability
  • Direct Drive Servos
  • Magnetic Couplings
  • Vacuum pumping system available
  • Electronics available
  • EquipeSoft software available
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