UPC Series Pressure Controllers
Source: Kinetics
Precision pressure control for pressure sensitive processes
Kineticsision pressure control for pressure sensitive processes
>User-selectable response rate
>Uses the proven advanced technology of popular mass flow controllers
>Best performance and reliability in the industry
>Available with elastomer or metal seals features at a glance
>User-selectable response rate between 0.5 sec. to 8.0 sec. using a rotary switch
>Microprocessor-controlled PID loop to meet desired response rate
>Highly versatile device that can control pressures from 1 Torr to 100 Torr in most chamber volumes
>Can be used with pressure transducer, capacitance manometer, thermocouple (not provided, supplied by user)
>Measures the flow rate with +1.0% accuracy with a 0.15% repeatability, making the flow rate an indication of process repeatability
>The solenoid proportional valve is designed with a 1:1000 turn down ratio for fast response. It has fewer parts to enhance speed responsiveness and long term reliability
>Model 1630 sealed with metal seal for a high leak integrity of 1 X 10-10 Atm-cc/sec (He)
>All performance tested per SEMI test methods
>3 year warranty (Model 1630)
>User-selectable response rate
>Uses the proven advanced technology of popular mass flow controllers
>Best performance and reliability in the industry
>Available with elastomer or metal seals features at a glance
>User-selectable response rate between 0.5 sec. to 8.0 sec. using a rotary switch
>Microprocessor-controlled PID loop to meet desired response rate
>Highly versatile device that can control pressures from 1 Torr to 100 Torr in most chamber volumes
>Can be used with pressure transducer, capacitance manometer, thermocouple (not provided, supplied by user)
>Measures the flow rate with +1.0% accuracy with a 0.15% repeatability, making the flow rate an indication of process repeatability
>The solenoid proportional valve is designed with a 1:1000 turn down ratio for fast response. It has fewer parts to enhance speed responsiveness and long term reliability
>Model 1630 sealed with metal seal for a high leak integrity of 1 X 10-10 Atm-cc/sec (He)
>All performance tested per SEMI test methods
>3 year warranty (Model 1630)
<%=company%>, 22600 Savi Ranch Pkwy, Yorba Linda, California 92687, Phone: 714-921-2640, Fax: 714-921-0804