UP SERIES Ultrapure Deionized Water Heaters
The Control Console contains illuminated switches, temperature controller; digital displays, LED safety interlocks and N2 purge flow meter. The control console can be mounted with the heating column(s) or remotecl into the cleanroom at the point of use of the heated Dl water.
ADVANTAGES OF USING HOT DI WATER:
- Improves removal of chemical residue and particles.
- Reduces DI water consumption up to 70% and reduces usage and discharge of hazardous chemicals.
- Reduces bacterial contamination and improves process yields.
- Uniform process temperature control. ยท Reduces thermal shock .
- Eliminates heat up time where chemical mixes are primarily DI water.
HOT DI WATER IS MUCH BETTER THAN COLD DI WATER!
Cleaning processes that use sulfuric acid (i.e., prediffusion clean and resist stripping) leave residual chemical particles that can affect yields and throughput. Particulates can be produced in as little as 48 hours via the migration and nucleation of the H,SO, molecules.
Additional process steps that have been taken to address this problem include:
- Chemical cleaning (i.e., hydrofluoric (HF) rinses and RCA cleans).
- Multiple DI water rinses (cold water).
- Mechanical agitation of the wafers in a cold DI bath.
These additional steps are undesirable because:
- HF and RCA clean processes generate additional hazardous chemical waste.
- Multiple cold DI water rinses waste costly DI water.
- Mechanically agitating the wafers adds energy to cold water rinses through the use of robotics which requires high maintenance.
Lufran Inc., 10200 Wellman Road, Streetsboro, OH 44241. Tel: 330-655-9797; Fax: 330-656-3500.