Unpatterned Wafer Technology Inspection System

The Srufscan SPI is a surface inspection system for semiconductor, material and equipment manufacturers. The equipment offers both oblique and normal illumination in a single system to enable the detection of a variety of defects in all types of unpatterned surfaces.

The Triple Beam Illumination feature provides increased detection sensitivity and the ability to classify scratches, particles, and other defect types on both smooth and rough surfaces.

The system incorporates an optional, proprietary brightfield channel, based on Nomarski differential interference contrast technology. The brightfield channel captures non-scattering, low frequency defects, such as mounds and dimples, and provides the ability to distinguish between concave and convex features.

KLA-Tencor, 160 Rio Robles, San Jose, CA 95134. Tel: 408-875-4200; Fax: 408-571-3030.