Product/Service

UNITY Series Etchers

Source: Tokyo Electron America, Inc.
TEL has delivered over 800 Unity systems to customers worldwide. Introduced in 1995, the UNITY II platform has gained a solid reputation for being one of the most reliable platforms available...
TEL has delivered over 800 Unity systems to customers worldwide. Introduced in 1995, the UNITY II platform has gained a solid reputation for being one of the most reliable platforms available. The UNITY was recognized in the prestigious VLSI Customer Satisfaction Survey (1998), as the World Leader in Etch System Performance. Various configurations are offered for wafer sizes from 150 to 300mm.

The UNITY M offers superior Cost of Ownership with a small footprint, and high throughput. The system features "S2" safety compliance, factory automation capability, and user-friendly software. TEL offers a long list of options including: configurations of up to 3 process chambers per system, up to 16 process gases per chamber, and various endpoint detection systems.

Tokyo Electron America, Inc., 2400 Grove Blvd., Austin, TX 78741. Tel: 512-424-1000; Fax: 512-424-1034.