Product/Service

Ultratech Reticles

Source: Photronics
Photronics is actively involved in a strategic partnership with Ultratech Stepper
Photronics is actively involved in a strategic partnership with Ultratech Stepper. This partnership allows for collaboration on customer specific applications issues as well as mutual consideration of reticle specifications for tools in development. Photronics supports Ultratech 1X reticles in all of the markets we mutually serve; IC, Thin Film Head, and Micro Machining. Typical specifications requested by customers are:

3 X 5 or 5 X 5

6 X 6

CD Tolerance (Mean to Target)
± 0.10µm
± 0.10µm

CD Range(Max-Min)
0.10µm
0.10µm

Pattern Placement to reference grid
± 0.10µm
± 0.10µm

Glass Type
Quartz
Quartz

Tighter Specifications are available on request.

Photronics, 15 Secor Road, Brookfield, CT 06804. Tel: 203 740 5697; Fax: 203 740 5618.