Product/Service

UltraPure PF Series Point-of-Use UHP Gas Purifiers

Source: NuPure Corporation
Purifier / Particle Filter combination
Features
  • Purifier / Particle Filter combination

  • Improves equipment performance and process economy

  • Sub-ppb removal of impurities from Inert Gases, Nitrogen, Hydrogen, Acid Gases, Oxygen and Hydride Specialty Gases

  • Integral 0.003µm Sintered Stainless Steel Filter Media (9 log reduction)

  • 316L stainless steel (< 10Ra) or 316L VAR (< 5Ra) electropolished wetted surface finish

  • Optional Hastelloy C-22 filter media / housing or Nickel filter media

  • In-Situ regeneration and bakeable to 450o C

Applications

  • Semiconductor Industry

  • High Purity Welding

  • Gas Analyzer Carts

  • Analytical Industry

  • Research and Development

  • Gas Bottle Filling Plants

NuPure Corporation, 5858 Rideau Valley Dr., Manotick, ON K0A 2W0. Tel: 613-692-5349; Fax: 613-692-1872.