Product/Service

Ultralite EPD™

Source: Momentum Technical Consulting, Inc.
Ultralite EPD™ software from Momentum is an Endpoint Detection system for Chemical Mechanical Polishing tools for wafers
Ultralite EPD™ software from Momentum is an Endpoint Detection system for Chemical Mechanical Polishing tools for wafers. It is a state-of-the-art system for accurately and consistently finding the endpoint of the polishing process. Besides providing real-time tool control, Ultralite EPD (tm) also has comprehensive data monitoring and analysis capabilities. Engineers and operators alike will appreciate the calue that Ultralite EPD (tm) adds to their CMP tools.

Features:

  • Endpoint Detection & Polish Stop for CMP
  • Single or Multiple Run Analyses of Test Vibration
  • Reprocess Data (Eliminates Test Wafers and Saves You $$$!!!)
  • Infinitely Configurable for Broad Range of Devices and Recipes
  • Real-Time Graphical Access to Process Data
  • History Charts

    Momentum Technical Consulting, Inc., 7000 Cameron Road, Suite 350, P.O. Box 142906, Austin, TX 78714-2906. Tel: 512-451-2863; Fax: 512-451-1770.