Ultraclean Miniature Pressure Transducer

The 870B Series Micro-Baratron miniature pressure transducer is for use in delivery systems that feed ultrapure gases into critical process systems. The building block design, using industry standard end-to-end dimensions and electrical connectors, makes it easy to do in-field upgrades without the use of tools. The transducers have a nominal sensor diameter of 1.1 inch (28 mm) and is the smallest transducer the company offers. Base on the industry standard Baratron, the capacitance-based pressure sensor provides an accuracy within 1% of reading.

This accuracy specification includes the effects of non-linearity, hysteresis, and repeatability and is superior to the usual specification that is given in terms of percent of full scale. As with all Baratron transducers, the pressure reading is independent of gas composition.

The transducers are suited for ultrapure gas delivery and measurement applications. All wetted surfaces have a surface finish better than 5 µin (Ra) and are of corrosion-resistant Inconel or Incoloy that are compatible with corrosive gas and liquid delivery systems such as those in semiconductor plasma etching and chemical vapor deposition process tools. The stainless steel shell is cleanroom compatible. The Micro-Baratron has a safety-engineered high-burst pressure rating for enhanced protection in the event of interlock failure.

Two types are available: the 870B has a single-ended connection and the 872B has a flow-through connection. The 870B Series is available in full-scale pressure ranges from 1000 Torr to 3000 psia. An optional miniature Local Display Module is available that can be mounted adjacent to the pressure sensor. A selection of power supply inputs, output signals, and connectors make it simple to interface the 870B/872B with virtually any control system. The 870B Series meets CE requirements for the European Common Market.

MKS Instruments, 6 Shattuck Rd., Andover, MA 01810. Tel: 800-227-8766 or 978-975-2350. Fax: 978-975-0093.