Ultra High Purity Mass Flow Controllers/Meters
Source: Kinetics
MultiFlo™ option for superior performance, reduced inventory and in-situ support
KineticsiFlo™ option for superior performance, reduced inventory and in-situ support
>Advanced design using proven technology for high performance required for next generation semiconductor applications
>Best performance and reliability in the industry
>Popular ultra high purity metal seal flow controller
>Available with analog,EIA-485,DeviceNet™ or Profibus interfaces features at a glance
>Recommended for corrosive and reactive gases because of its advanced corrosion resistance. A combination of Vim/Var steel material passivated with highly effective environmentally-friendly organic/chelant passivation process gives the surface
finish characteristics that exceed SEMI specifications for corrosion resistance (SEMI F19-95 for wetted surfaces and SEMI F-20-95 for material)
>Ultra-High Purity 4µ inch Ra surface finish
>Reduces dry-down time by 50% compared to high purity 1660 Series Models. Dry-down is reduced because of better surface smoothness and chemistry. 8160 Series also have higher purge flows than conventional MFCs
>Sealed with high leak integrity metal seal to produce a leak integrity of 1 x 10-10 Atm-cc/sec (He)
>Higher reliability-MTBF of 550,000 hours-and ultra-low drift of less than 0.6% per year to reduce year-to-year maintenance, increase uptime and reduce cost-of-ownership
>Statistically verified accuracy. Allows you to easily replicate processes from tool-to-tool and fab-to-fab and to use a single MFC over a wider range of flows
>Minimized dead space for increased accuracy and faster response time under all turn-on conditions
>Designed to meet the SEMI standard for Sensor Actuator Network Communications for DeviceNet (SEMI #E54-97). Model 8165 specifically designed for full ODVA compliance
>Advanced design using proven technology for high performance required for next generation semiconductor applications
>Best performance and reliability in the industry
>Popular ultra high purity metal seal flow controller
>Available with analog,EIA-485,DeviceNet™ or Profibus interfaces features at a glance
>Recommended for corrosive and reactive gases because of its advanced corrosion resistance. A combination of Vim/Var steel material passivated with highly effective environmentally-friendly organic/chelant passivation process gives the surface
finish characteristics that exceed SEMI specifications for corrosion resistance (SEMI F19-95 for wetted surfaces and SEMI F-20-95 for material)
>Ultra-High Purity 4µ inch Ra surface finish
>Reduces dry-down time by 50% compared to high purity 1660 Series Models. Dry-down is reduced because of better surface smoothness and chemistry. 8160 Series also have higher purge flows than conventional MFCs
>Sealed with high leak integrity metal seal to produce a leak integrity of 1 x 10-10 Atm-cc/sec (He)
>Higher reliability-MTBF of 550,000 hours-and ultra-low drift of less than 0.6% per year to reduce year-to-year maintenance, increase uptime and reduce cost-of-ownership
>Statistically verified accuracy. Allows you to easily replicate processes from tool-to-tool and fab-to-fab and to use a single MFC over a wider range of flows
>Minimized dead space for increased accuracy and faster response time under all turn-on conditions
>Designed to meet the SEMI standard for Sensor Actuator Network Communications for DeviceNet (SEMI #E54-97). Model 8165 specifically designed for full ODVA compliance
<%=company%>, 22600 Savi Ranch Pkwy, Yorba Linda, California 92687, Phone: 714-921-2640, Fax: 714-921-0804