Product/Service

Ultra High Concentration Clean Ozonizer

Source: EBARA Technologies, Incorporated (ETI)
Ebara's ozonizers generate clean, reliable, ultrahigh purity ozone designed for many semiconductor applications
Ebara's ozonizers generate clean, reliable, ultrahigh purity ozone designed for many semiconductor applications. The ozonizers use a unique trench discharge cell, which is made of pure aluminum, monocrystal sapphire dielectric, and high frequency AC power supply that produces high concentrations of virtually impurity free ozone. The high voltage and ground electrodes are cooled with deinozed water to enhance the ozone generation. Fail-safe operations, ozone leak detectors and S2-93 compliancy allow for safe operations. Ebara's models range from 4-72 LPM at 8 vol% ozone gas delivery.

Features

System Features

  • Ultra high concentration ozone
  • Ultra clean ozone
  • High concentration stability
  • Trench type cell with long lifetime
  • Compact design
  • Advanced, reliable safety system
  • S2-93/CE compliant
Standard Features
  • Water leak/dewing sensor
  • Ozone leak detector
  • Water chiller
  • Conductivity sensor for cooling water
Optional Features
  • Ozone Monitor
  • Exhaust Damper
  • Exhaust pressure switch
  • UPS for control power

EBARA Technologies, Incorporated (ETI), 51 Main Avenue, Sacramento, CA 95838. Tel: 916-920-5451; Fax: 916-925-6654.