Turnkey Wafer Handling Systems

Featured at Semicon West

Automation Modules, Inc. will introduce the WHU300 at July's Semicon West in San Francisco. The WHU300 is designed to provide semiconductor equipment suppliers a complete wafer movement solution for their process tool. It can reduce process tool development times by up to a third and can dramatically reduce the research and development costs sustained by equipment manufacturers. The WHU300 is designed to receive a SEMI-standard FOUP (Front Opening Unified Pod), orient it, open it, and transfer wafers to the process station. Once the wafers have been processed, the WHU300 will return them back to the FOUP. Each WHU300 is customized for the specific tool and fully integrated into the process chamber technology. The typical process tool development cycle for the new generation of semiconductor equipment runs 18 months or more.

AMI can cut up to a third of that development time by designing the internal material handling. Delivery times for the initial custom designed WHU300 will be three to six months after receipt of specifications. Subsequent unit production and delivery is highly integrated with the tool manufacturer's build-ship schedule.

Automation Modules, Inc., 42285 Osgood Rd. Unit A, Fremont. CA 94539 Tel: 510-661-2900; Fax: 510-252-1690.