Turnkey Tool Automation

The open architecture Plus Platform integrates the automation, isolation and information technology semiconductor device manufacturers demand, providing automated tool front-end solutions for seamless integration between original equipment manufacturers' (OEMs) production tools and advanced fab automation systems.

The platform incorporates multiple loadport (150 mm through 300 mm available), robotic and pre-aligner, auto ID, environmental control and software systems. The complete system fully integrates these critical functions into a turnkey material handling and factory automation interface for the full range of process and metrology tools. The system is designed to communicate with a supervisory controller and ultimately with the fab's in-house MES system.

Asyst Technologies, 48761 Kato Road, Fremont, CA 94538. Tel: 510-661-5000. Fax: 510-661-5166.