Turbomolecular Pumps ET Series

EBARA's turbomolecular pumps offer full magnetic levitation, which provides for a clean, reliable vacuum for today's high technology environments. The ET Series features a five axis magnetic bearing and tuning free half rack controllers. The ET Series offers two major types of turbomolecular pumps, high compression, ET-H Series, and a wide range corrosion resistant, ET-WS Series. The ET-WS Series also offers a temperature- controlled model, ET-WS (-A), turbo for etching applications. EBARA also features the Cryo-Turbo model, ET-K Series, which combines a cold head to the ET Series for increased water pumping.

The ET Series controllers are19" half rack, tuning free controllers that require no battery back up. If power fails rotational energy generates electric power to support the rotor. Pump and controllers have interchangeability for the same models. Easy monitoring by LCD displays running conditions, rotation speed, running hours, and operating status (alarm trips).

EBARA's high compression ratio type turbomolecular ET-H Series features the five-axis magnetic bearing and high compression ratio performance giving a clean ultrahigh vacuum environment. The ET-H Series provides a range of turbo pumps with pumping speed of N₂ from 300 –1600 L/s and H₂ compression ratios >10⁶ .

EBARA's Wide-Range Type Turbomolecular Pump ET-W Series features the five-axis magnetic bearing and wide pressure range giving a clean vacuum environment. The ET-W Series has a large allowable backpressure (max. 3 Torr) enables simplification of foreline exhaust system. Anticorrosion models provide superior durability to all reactive gasses. The temperature controlled models provide less build-up of chemicals. ET-W Series provides a range of turbo pumps with pumping speed of N₂ from 300 –1600 L/s.

EBARA's Cryo-Turbo Type Pump ET-K Series is a complete oil free pump that features the five axis magnetic bearing. The installation of a Cold Panel collects moisture in the suction port, eliminating the drawbacks of conventional ultrahigh vacuum pumps. The ET-K Series features high water molecule exhaust capacity and high-speed exhaust up to ulltrahigh vacuum. ET-K Series provides a pumping speed of H₂O speed of 1,700 and 3,200 L/s.

EBARA Technologies, Incorporated (ETI), 51 Main Avenue, Sacramento, CA 95838. Tel: 916-920-5451; Fax: 916-925-6654.