Product/Service

Tungsten Slurry

Source: Cabot Microelectronics Corporation
The SEMI-SPERSEO W2585 tungsten slurry is an all-purpose slurry capable of polishing all tungsten layers in a damascene architecture
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The SEMI-SPERSEO W2585 tungsten slurry is an all-purpose slurry capable of polishing all tungsten layers in a damascene architecture. It enables CMP processing for high-end microprocessors and memory devices with 0.18-micron and below geometries. Improved device performance, lower defectivity levels and higher yields are achieved due to a significant reduction in oxide erosion and microscratches, which can normally occur during polishing.

Cabot Corp. Microelectronics Materials Division, 5080 Robert J Matthews Pkwy, El Dorado Hills, CA 95762. Tel: 916-939-9367. Fax: 916-939-1416.