Tungsten Hexafluoride
Source: Matheson Tri-Gas, Inc.
Matheson currently manufactures higher purity Tungsten Hexafluoride for semiconductor manufacturing processes
Matheson currently manufactures higher purity Tungsten Hexafluoride for semiconductor manufacturing processes. Matheson has purchased a new VG Axiom ICP-MS for metals analysis of Tungsten Hexafluoride and other gases. The new instrument improves on Matheson's previous gas analysis protocol by improving on the detection limits for metals in Tungsten Hexafluoride by a factor of 10 over other conventional ICP-MS instruments. This second ICP-MS instrument together with recent upgrades to the computer control system, used in its process, enable Matheson Tri-Gas to manufacture the highest purity Tungsten Hexafluoride, including Gigabit grade, more efficiently. Dual process trains are in use and provide for redundant production of Tungsten Hexafluoride from Difluoride and elemental Tungsten resulting in a more stable and reliable supply of Tungsten Hexafluoride for semiconductor manufacturing processes.
Matheson Tri-Gas, Inc., 625 Wool Creek Drive, San Jose, CA 95112. Tel: 408-971-6500; Fax: 408-275-8643.