TruCal Calibration Compensation

Brooks' TruCal Calibration Compensation provides instant calibration when the MFC is installed in the line. This feature saves time in setting up a new mass flow controller for process activation. In the past, each controller had to be calibrated using linear trial and error factors, resulting in errors in flow measurement. With TruCal calibrations, MFCs can provide accurate results from the moment they are first installed.

TruCal provides an accurate process gas calibration to an MFC that has never seen that process gas. With the flexibility of a digital-based mass flow controller, such as the PureDigital SELECT, users will now be able to use the computational capabilities built into TruCal to provide a mathematical computation rather than a constant gas factor, making the device behave as though it were calibrated on the actual process gas.

TruCal process is now available for dozens of toxic gases and is continually being made available for additional gases. Since most gases used in semiconductor processing applications are extremely noxious, they are very difficult to handle and even more difficult to calibrate. Because of this, most MFC manufacturers use surrogate gases for calibration, which can result in significant error on the actual process gas. TruCal eliminates this problem.

Brooks Instrument's Semiconductor Group, 407 W. Vine St., Hatfield, PA 19440. Contact: Mary Beth DiEleonora, 215-362-3669 or-800-799-SEMI ; Fax: 215-362-3745.