TRIMETHYLBORON
Source: Voltaix, Inc.
A pyrophoric, colorless, assumed to be toxic gas, used as a stable boron source for the simultaneous deposition of boron and carbon
A pyrophoric, colorless, assumed to be toxic gas, used as a stable boron source for the simultaneous deposition of boron and carbon or as the boron source in BPSG deposition.![]()
Voltaix, Inc., P.O. Box 5357, 197 Meister Avenue, North Branch, NJ 08876. Tel: 908-231-9060; Fax: 908 231-9063.