Product/Service

Track and Stepper Software

Source: Auto-Soft
A Windows NT-based software package, designated PhotoStation, coordinates and synchronizes track and stepper equipment
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Auto-SoftT-based software package, designated PhotoStation, coordinates and synchronizes track and stepper equipment. It is designed to improve lithography throughput by 10 to 14%, ensure continuous processing, eliminate scrap and rework, and boost productivity.

Features of the package include:

  • Automatic recipe download
  • Automatic starting of lots and queuing of reticles
  • Resource availability checking
  • On-the-fly tool adjustments
  • Wafer count verification after processing
  • Graphical user interface (GUI)
  • Quick recipe creation
  • Tracking databases
  • Recipe management

    • <%=company%>, 5245 Yeager Road, Salt Lake City, UT 84116. Tel: 801-322-2069. Fax: 801-322-1846.