Tracer Gas Testing (SEMI F15) Services

GS³ is the true one-stop-shop for the semiconductor equipment safety consulting industry. In addition to the product safety evaluations to SEMI S2 and other safety standards, we also offer full service Tracer Gas Testing of exhausted enclosures to SEMI F15 at our Tracer Gas Testing Laboratory in Menlo Park, CA.

GS³'s unique tracer gas laboratory gives equipment manufacturers the advantage of tracer gas testing in a controlled environment. The lab, located in Menlo Park, California has been set up solely for supporting tracer gas testing. This allows more flexibility in testing, and the opportunity to thoroughly evaluate ventilated enclosures. This "Exhaust Optimization" gives equipment suppliers the ability to specify lower exhaust rates, yet achieve the necessary flows to provide safety, thus the cost of ownership of tools. This will also position your tool meet the installation requirements of the SEMATECH member companies. Of course, GS³ can also perform Tracer Gas Testing at your facility.

Tracer Gas Analysis results can also be used to evaluate the effect the following items would have on the ability of the enclosure to contain a release:

Reduce exhaust ventilation rates.

Static pressure changes within the exhaust ducts

Static Pressure changes within the enclosure

Enclosure openings and leak points

Air patterns within the enclosure

Design Review:
Let GS³ help differentiate you from your competitors by assisting you in designing and developing ventilated gas boxes that are efficient and meet the industry guidelines. By working with GS³ from the designing concept through implementation and evaluation, our tracer gas and exhaust optimization techniques can result in a reduced cost of ownership for your customers and competitive advantage to your firm.

Global Semiconductor Safety Services (GS3), 1365 Adams Court, Menlo Park , CA 94025 . Tel: 650-463-4650 ; Fax: 650-329-8260 .