Thompson Named President of UltraBeam Lithography

Ultratech Stepper, Inc., a supplier of photolithography systems, has promoted Larry Thompson, PhD to president of UltraBeam Lithography, Inc., a division of Ultratech. Thompson replaces Richard Williams, who will continue to serve the company in a consulting capacity.

In his new position Thompson will be responsible for directing all areas of the company's UltraBeam division, which develops electron beam mask pattern generation tools for the global semiconductor industry. He will also oversee the development of the company's next generation technology to support mask-masking requirement for the 0.18 micron and below device generations.

Thompson joined Ultratech as vice president of the advanced technology last year following Ultratech's acquisition of Integrated Solutions, Inc., where he was vice president, R&D and chief technical officer. Before joining ISI, he spent 25 years at AT&T Bell Laboratories.

For more information contact Ultratech Stepper, at 408-577-3009.