Thin Film Analyzers
The 1512RT and the 1800RT are based on n&k measurement technology, which simultaneously measures reflectance and transmittance over the wavelength range of 190nm-1000nm, determining film thickness and the optical constants, n and k.
The 1512RT Analyzer is designed for the photomask industry where phase shift, transmission and lithography characteristics are of paramount importance. The 300mm x 300mm stage travel of the 1512RT is also ideally suited for small area display manufacturing.
The 1800RT Analyzer with its 1000mm x 750mm stage travel and fully automated, multiple cassette sample handling capability is ideally suited for large area flat panel displays.
The series incorporates the only metrology method available that provides simultaneous measurement of R and T at the same point with automated X-Y mapping and Z adjustment (vertical adjustment) for different sample geometries. Thickness, n and k spectra (from 190
-1000 nm) and energy bandgap (Eg) are simultaneously measured and mapped. The series provides results non-destructively, with measurements two to three times faster than any other tool currently used to characterize film heterostructures on transparent substrates.
<%=company%>, 3150 De La Cruz Boulevard, Santa Clara, California 95054, Tel: 408-982-0840, Fax: 408-982-0252