Product/Service

Thermoelectric Temperature Control Literature

Source: Advanced Energy Industries, Inc.
A new series of literature describing thermoelectric temperature control for advanced semiconductor etch applications is now available
Advanced Energy Industries, Inc. series of literature describing thermoelectric temperature control for advanced semiconductor etch applications is now available. The point-of-use (POU) systems provide dynamic temperature control for the wafer chuck and chamber walls. The product line also includes systems that can provide process advantages for wet etch and track applications.

POU System Benefits

  • Precise temperature control in real time
  • No temperature drift
  • Compact design
  • Small footprint
  • High reliability
  • Solid-state operation with only one moving part
  • Process flexibility
  • Low power usage
  • High tool up-time
  • Environmentally friendly operation

    <%=company%>, 1625 Sharp Point Drive, Fort Collins, CO 80525, Phone: 800-446-9167, Fax: 970-221-5583