Thermo Scientific Helios 6 HD Focused Ion Beam Scanning Electron Microscope (FIB-SEM)

The new Thermo Scientific Helios 6 HD Focused Ion Beam Scanning Electron Microscope (FIB-SEM) enables site-specific, ultra-thin sample preparation, designed to produce a high volume of quality transmission electron microscopy (TEM) data to support semiconductor manufacturers’ imaging and failure analysis needs during device design and fabrication.

This latest addition to Thermo Fisher Scientific’s family of industry standard DualBeam instruments can be operated manually, or in semi-automated fashion, and offers users the opportunity to achieve an increase in productivity compared to other commercially available solutions.

Delivering more samples per hour, and more high-quality sample output than previous generations, this new solution enables failure analysis labs the potential to reduce operating costs while delivering high quality TEM samples on a wide range of device technologies.

Key Applications
Generate large volumes of high-quality TEM samples of various complexity. Increase production yields, enhance product quality and accelerate time to market.

Features/Benefits

• New FIB column design with automated source and column alignments enables higher system availability for increased productivity and more consistent results.
• New digital scanning and patterning engine allows for simultaneous SEM imaging and milling, a 50X improvement in scan rotation precision and a more than 2X improvement in cut placement for more accurate pattern positioning, end-pointing on regions of interest and more successful TEM data samples compared to previous generations.  
• New Thermo Scientific AutoTEM 6 Software supports achievement of a 45% decrease in setup time, and many productivity-and-ease-of-use improvements, including AI-enabled grid management and automatic alignment compared to previous generations.
• New Thermo Scientific EasyLift NanoManipulator enables 3X longer intervals between needle change and therefore a 50% reduction in needle replacement time compared to previous generations.

For more information, visit thermofisher.com/Helios6HD