Thermal Processing Applications - Alpha-8SE

Tokyo Electron's Alpha-8 series diffusion and LP-CVD furnaces are the industry choice for critical thermal processing applications. These systems provide exceptional productivity with minimal maintenance, are designed to be compatible with AGV technology, and are available with fully integrated SMIF options. The Alpha-8SE, TEL's latest generation of the Alpha-8 product line, serves as an example of the way Tokyo Electron listens and responds to customer feedback. In developing the Alpha-8SE, we analyzed reliability and uptime data from our worldwide customer base.

Key components were redesigned to improve reliability and ease of service. Wherever possible, equipment configurations have been standardized to reduce cost and improve reliability. Fully characterized, production worthy processes are available for virtually all logic and memory applications. The result is a system that meets the production requirements of today's most advanced semiconductor devices, as well as future generations that require sub-0.18 micron design rules.

Tokyo Electron America, Inc., 2400 Grove Blvd., Austin, TX 78741. Tel: 512-424-1000; Fax: 512-424-1034.