TEOS Monitor

The PureAire TEOS Monitor is an extremely sensitive system for the detection and measurement of TEOS, a commonly used silicon source. Designed to respond quickly to potentially hazardous leaks and releases TEOS concentrations, it measures concentrations as low as 1 PPM yet does not react to alcohol-based cleaning solvents such as IPA. Moreover, the system's low-level measurement accuracy is unaffected by changes in ambient temperature or humidity.

The heart of the system is an extremely sensitive sensor linked to a compact pyrolyzer. Sample is drawn through the pyrolyzer where any TEOS present is converted into a more easily detected and measured substance. Concentration information is displayed on a local readout and output as a 4-20 mA signal. For installation versatility, the signal from the transmitter may be routed directly to alarm, control, or facility-wide surveillance systems.

PureAire Monitorings Systems, Inc., 5420 Newport Drive, Suite 57, Rolling Meadows, IL 60008. Tel: 847-788-8000; Fax: 847-788-8080.