Technic Real Time Analyzer (RTA) for Copper Damascene
Technic's RTA is an automated, on-line, and in-tank process control system for monitoring electroplating processes
N/ATA is an automated, on-line, and in-tank process control system for monitoring electroplating processes. RTA analytical techniques are based on patented electrochemical technology utilizing AC and DC voltammetry. The RTA controls all critical components in copper Damascene electrodeposition to ensure high reliability manufacturing. Specific applications are immediately available to support commercial processes from Enthone OMI, Shipley Ronal and Technic.
<%=company%>, P.O. Box 9650, Providence, RI 02940, Tel: (401) 781-6100, Fax: (401) 781-2890