Product/Service

T-6100 Temperature Chuck System

Source: Thermonics Inc.
The T-6100 is designed to facilitate testing of wafers for device characterization and process integrity at a wide range of temperatures. Incorporation of an electrically passive chuck enables acquisition of low-level measurements without noise, leakage or capacitance difficulties.

The T-6100 is designed to facilitate testing of wafers for device characterization and process integrity at a wide range of temperatures. Incorporation of an electrically passive chuck enables acquisition of low-level measurements without noise, leakage or capacitance difficulties.

  • Temperature range of -65C to +135C.
  • Simplified operator interface.
  • Low-profile chuck design.
  • Frost-free operation.

Thermonics Inc., 3350 Scott Blvd #32, Santa Clara, CA 95054. Tel: 408-496-6838; Fax: 408-496-6918.